The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2021

Filed:

Mar. 28, 2017
Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Yutaka Ito, Tsukuba, JP;

Yukiko Takenaka, Tsukuba, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/52 (2006.01); H01L 51/00 (2006.01); C23C 16/40 (2006.01); C23C 16/509 (2006.01); G01N 23/18 (2018.01); H01J 37/244 (2006.01); H01J 37/285 (2006.01); H01L 51/56 (2006.01); B05D 1/00 (2006.01); B05D 3/06 (2006.01);
U.S. Cl.
CPC ...
H01L 51/5253 (2013.01); C23C 16/401 (2013.01); C23C 16/509 (2013.01); G01N 23/18 (2013.01); H01J 37/244 (2013.01); H01J 37/285 (2013.01); H01L 51/0097 (2013.01); H01L 51/56 (2013.01); B05D 1/005 (2013.01); B05D 3/067 (2013.01); C23C 16/402 (2013.01); H01L 2251/303 (2013.01); Y02E 10/549 (2013.01); Y02P 70/50 (2015.11);
Abstract

A laminated film containing a gas barrier layer and an inorganic polymer layer laminated on a resin substrate, wherein a Y value calculated from a transmission electron microscope image of a cross section of the inorganic polymer layer by the following procedures (a) to (d) is 0.220 or less: (a) Calculating a standard deviation (σ) of the contrast of an electron beam-unirradiated part of the inorganic polymer layer; (b) Dividing an electron beam-irradiated part of the inorganic polymer layer into twenty parts having a film thickness equal in a film thickness direction, and calculating a standard deviation (an: standard deviation of ndivision, n=1˜20) of the contrast of each divided part; (c) Calculating Xn (n=1˜20) of each divided part from the expression (1): Xn=σn/σ (n=1˜20) . . . (1); and (d) A standard deviation of X3 to X18 is defined as Y.


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