The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2021
Filed:
Oct. 31, 2019
Samsung Electronics Co., Ltd., Suwon-si, KR;
Taejin Park, Suwon-si, KR;
Keunnam Kim, Suwon-si, KR;
Huijung Kim, Suwon-si, KR;
Sohyun Park, Suwon-si, KR;
Jaehwan Cho, Suwon-si, KR;
Yoosang Hwang, Yongin-si, KR;
SAMSUNG ELECTRONICS CO., LTD, Gyeonggi-Do, KR;
Abstract
A semiconductor device includes a substrate, a bit line structure on the substrate, a contact plug structure being adjacent to the bit line structure and extending in a vertical direction perpendicular to an upper surface of the substrate, and a capacitor electrically connected to the contact plug structure. The contact plug structure includes a lower contact plug, a metal silicide pattern, and an upper contact plug that are sequentially stacked on the substrate. The metal silicide pattern has an L-shaped cross section.