The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2021

Filed:

Aug. 29, 2019
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Jun Kato, Utsunomiya, JP;

Toshiki Ito, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/027 (2006.01); B29C 59/02 (2006.01); B32B 27/30 (2006.01); B32B 27/38 (2006.01); C08F 2/48 (2006.01); G03F 7/00 (2006.01); G03F 7/09 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 21/0273 (2013.01); B29C 59/026 (2013.01); B32B 27/308 (2013.01); B32B 27/38 (2013.01); C08F 2/48 (2013.01); G03F 7/0002 (2013.01); G03F 7/094 (2013.01); B32B 2255/26 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01);
Abstract

The method for fabricating pattern of a cured product includes a first step (arranging step) of arranging a layer formed of a liquid film of a curable composition (α1) containing at least a component (A1) serving as a polymerizable compound on a substrate and a second step (dispensing step) of dispensing liquid droplets of a curable composition (α2) containing at least a component (A2) serving as a polymerizable compound discretely onto a layer formed of a composition (α1') of components of the curable composition (α1) except a component (D1) serving as a solvent, in which: the mixing of the composition (α1′) and the curable composition (α2) is exothermic.


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