The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2021
Filed:
Dec. 13, 2018
Lam Research Corporation, Fremont, CA (US);
Hossein Sadeghi, Glendale, CA (US);
Scott Baldwin, Reston, VA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Systems and methods for real time semiconductor manufacturing cluster tool health monitoring are provided via an in-situ sensor. In a method embodiment, an operation procedure for pumping/venting load lock (LL), and LL doors facing vacuum transfer module (VTM) and equipment front end module (EFEM), sensor installation location and operation procedure, and data flow and analysis process are provided. The sensor provides real-time data and monitors airborne particle contamination on EFEM, load lock (LL), and VTM, and plurality of process modules (PMs) simultaneously by correlating door open/close time and vent/pump timing in the loadlock to the particle measurement data. The method further provides an operation for determining that a maintenance procedure is recommended on one of the EFEM, the LL, the VTM, or the plurality of PMs based on the real time measurement data, door state data, and using machine learning algorithms.