The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2021
Filed:
Oct. 26, 2019
Applicant:
Shimadzu Corporation, Kyoto, JP;
Inventor:
Junichiro Kozaki, Kyoto, JP;
Assignee:
Shimadzu Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 31/06 (2006.01); F16K 31/04 (2006.01); F16K 31/02 (2006.01); G05D 16/20 (2006.01); F16K 41/10 (2006.01); F16K 37/00 (2006.01);
U.S. Cl.
CPC ...
F16K 31/02 (2013.01); F16K 31/04 (2013.01); F16K 31/0655 (2013.01); F16K 31/0675 (2013.01); F16K 37/005 (2013.01); F16K 41/10 (2013.01); G05D 16/202 (2013.01); Y10T 137/7761 (2015.04);
Abstract
A vacuum valve for driving a valve body arranged facing a valve opening up and down relative to the valve opening to perform valve opening/closing operation, comprises: a first up-down driver configured to drive the valve body up and down with a first minimum drivable amount; and a second up-down driver configured to drive the valve body up and down with a second minimum drivable amount smaller than the first minimum drivable amount.