The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2021

Filed:

Apr. 21, 2014
Applicant:

Koninklijke Philips N.v., Eindhoven, NL;

Inventors:

Kamal Asadi, Eindhoven, NL;

Johan Hendrik Klootwijk, Eindhoven, NL;

Assignee:

Koninklijke Philips N.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/033 (2006.01); H01L 21/027 (2006.01); B81C 1/00 (2006.01); B01D 71/02 (2006.01); B01D 69/12 (2006.01); B01D 67/00 (2006.01);
U.S. Cl.
CPC ...
B01D 69/12 (2013.01); B01D 67/00 (2013.01); B01D 67/0039 (2013.01); B01D 67/0044 (2013.01); B01D 67/0051 (2013.01); B01D 67/0062 (2013.01); B01D 67/0067 (2013.01); B01D 71/02 (2013.01); B01D 71/021 (2013.01); B01D 71/028 (2013.01); B81C 1/00 (2013.01); B81C 1/00468 (2013.01); H01L 21/027 (2013.01); H01L 21/033 (2013.01);
Abstract

Disclosed is a method of manufacturing a partially freestanding two-dimensional crystal film ('), the method comprising providing a substrate () carrying a catalyst layer () for forming the two-dimensional crystal layer on a first surface; forming the two-dimensional crystal film on the catalyst layer; covering at least the two-dimensional crystal film with a protective layer (); etching a cavity () in a second surface of the substrate, the second surface being opposite to the first surface, said cavity terminating on the catalyst layer; etching the exposed part of the catalyst layer from the cavity; and removing the protective layer, thereby obtaining a two-dimensional crystal film that is freestanding over said cavity. A device manufactured in this manner is also disclosed.


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