The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 08, 2021

Filed:

Jul. 22, 2019
Applicant:

Omnivision Technologies, Inc., Santa Clara, CA (US);

Inventor:

Eric Webster, Mountain View, CA (US);

Assignee:

OmniVision Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04N 5/355 (2011.01); H01L 27/146 (2006.01); H04N 5/378 (2011.01); G01S 7/4914 (2020.01); H04N 13/254 (2018.01);
U.S. Cl.
CPC ...
H04N 5/3559 (2013.01); G01S 7/4914 (2013.01); H01L 27/1463 (2013.01); H01L 27/1464 (2013.01); H01L 27/14614 (2013.01); H01L 27/14623 (2013.01); H01L 27/14636 (2013.01); H01L 27/14643 (2013.01); H04N 5/378 (2013.01); H04N 13/254 (2018.05);
Abstract

A time-of-flight pixel array comprises multiple pixel cells. The pixel cell comprises a light collection region, a light shielded region, and a deep trench isolation (DTI) structure that encircles the light collection region to prevent light from entering the light shielded region. Photogate in the light collection region is disposed above a photodiode to accumulate the photo-generated electrical charges. A doped region disposed near the photogate collects the attracted charges. The doped region extends to the light shielded region and transfers the collected charges to a floating diffusion through a shutter transistor also in the light shielded region. DTI or similar structures are deployed to the entire pixel array to prevent light from exchanging between different light collection regions and light from entering the light shielded regions of all pixel cells. Interference between the shielded regions of different pixel cells is also minimized.


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