The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 08, 2021

Filed:

Aug. 24, 2018
Applicant:

Korea Institute of Science and Technology, Seoul, KR;

Inventors:

Doh-Kwon Lee, Seoul, KR;

Jangmi Lee, Seoul, KR;

Inho Kim, Seoul, KR;

Jeung-hyun Jeong, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0463 (2014.01); G03F 7/20 (2006.01); H01L 31/18 (2006.01); H01L 31/0224 (2006.01); H01L 31/0445 (2014.01); H01L 31/032 (2006.01);
U.S. Cl.
CPC ...
H01L 31/0463 (2014.12); G03F 7/70625 (2013.01); H01L 31/022433 (2013.01); H01L 31/0322 (2013.01); H01L 31/0445 (2014.12); H01L 31/1868 (2013.01);
Abstract

According to an aspect of the present invention, there is provided a method of manufacturing a compound thin film, which includes configuring an electrodeposition circuit by connecting an electrolytic solution, which is manufactured by mixing a predetermined precursor with a solvent, and an electrochemical cell, which includes a working electrode in a form of an electrode at which a specific pattern is patterned on a predetermined substrate, to a voltage application device or a current application device, and applying a reduction voltage or current to the working electrode using the voltage application device or the current application device, and selectively electrodepositing a thin film in some region of the electrode along a shape of the electrode at which the specific pattern is patterned.


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