The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 08, 2021

Filed:

Apr. 24, 2017
Applicant:

Kyocera Corporation, Kyoto, JP;

Inventor:

Takeshi Muneishi, Kyoto, JP;

Assignee:

KYOCERA Corporation, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); H01L 21/683 (2006.01); H05B 3/03 (2006.01); H05B 3/10 (2006.01); H05B 3/00 (2006.01); H05B 3/20 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); H05B 3/14 (2006.01); H05B 3/48 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/67103 (2013.01); H01L 21/67248 (2013.01); H01L 21/687 (2013.01); H01L 21/68785 (2013.01); H05B 3/00 (2013.01); H05B 3/03 (2013.01); H05B 3/10 (2013.01); H05B 3/143 (2013.01); H05B 3/20 (2013.01); H05B 3/48 (2013.01); H01L 21/6831 (2013.01);
Abstract

A heater system may include a ceramic heater and a drive device. The ceramic heater may include a ceramic substrate and a resistance heating element. The ceramic substrate may include an upper surface. The resistance heating element may extend in an internal portion or on a surface of the ceramic substrate along the upper surface of the ceramic substrate. The drive device may include a main driving part, which supplies the main power to the entirety of the resistance heating element, and an additional driving part, which supplies additional power to a divided region that is a portion of the resistance heating element, by superimposing it on the main power.


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