The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 08, 2021

Filed:

Oct. 23, 2018
Applicant:

Merck Patent Gmbh, Darmstadt, DE;

Inventors:

Sachin Bobade, Sommerville, NJ (US);

Orest Polishchuk, Bayonne, NJ (US);

Munirathna Padmanaban, Sunnyvale, CA (US);

Durairaj Baskaran, Bridgewater, NJ (US);

Assignee:

Merck Patent GMbH, Darmstadt, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C07F 7/18 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02359 (2013.01); C07F 7/1804 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); H01L 21/02164 (2013.01); H01L 21/02203 (2013.01); H01L 21/02282 (2013.01); H01L 21/02362 (2013.01); H01L 21/28556 (2013.01); H01L 21/28568 (2013.01); H01L 21/76877 (2013.01); H01L 23/5329 (2013.01); H01L 23/53228 (2013.01);
Abstract

The present invention relates to new aromatic-amino functional siloxanes, which are compounds comprising one or two tail groups X, and a linking group L of structure (2) linking each said tail group to said head group, wherein the head group X has structure (1), containing an optional organic moiety Y, wherein the attachment point of said tail group Xthrough said linking group L to the head group X, may be, at positions a, b, c, d, or e. Another aspect of this invention are compositions containing these novel aromatic amino functional siloxane. A further aspect of this invention are compositions comprised of the above novel aromatic-amino functional siloxanes, and also the composition resulting from the aging of these compositions at room temperature for about 1 day to about 4 weeks. Still further aspects of this invention are processes for forming self-assembled monolayers on a substrate, from the aged composition, and also the processes of coating these aged compositions on patterned porous dielectrics to cap them also the processes of metallization of these capped pattered porous dielectrics.


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