The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2021
Filed:
Feb. 12, 2020
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Tomonori Matsushita, Chino, JP;
Nozomu Hirokubo, Fujimi, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G01J 3/28 (2006.01); G01J 3/26 (2006.01); G01J 3/02 (2006.01); G01J 3/06 (2006.01); G01J 3/10 (2006.01); G01J 3/32 (2006.01); G01J 3/42 (2006.01); G01J 3/50 (2006.01);
U.S. Cl.
CPC ...
G02B 26/001 (2013.01); G01J 3/027 (2013.01); G01J 3/0264 (2013.01); G01J 3/0291 (2013.01); G01J 3/06 (2013.01); G01J 3/10 (2013.01); G01J 3/26 (2013.01); G01J 3/28 (2013.01); G01J 3/2823 (2013.01); G01J 3/32 (2013.01); G01J 3/42 (2013.01); G01J 3/50 (2013.01);
Abstract
An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.