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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11029448 B1

PDFFull Text
Date of Patent:
Jun. 08, 2021

Filed:

Oct. 15, 2018

Thin films and a method for making the same

Applicant:

Oregon State University, Corvallis, OR (US);

Inventors:

Cory K. Perkins, Corvallis, OR (US);

Ryan Helmut Mansergh, Corvallis, OR (US);

Juan Carlos Ramos, Corvallis, OR (US);

Douglas A. Keszler, Corvallis, OR (US);

Assignee:

Oregon State University, Corvallis, OR (US);

Attorney:

Klarquist Sparkman, LLP

Primary Examiner:

Mahidere S Sahle

Int. Cl.
CPC ...
G02B 3/00 (2006.01); G02B 7/00 (2021.01); G02B 9/00 (2006.01); G02B 11/00 (2006.01); G02B 13/00 (2006.01); G02B 15/00 (2006.01); G02B 17/00 (2006.01); G02B 25/00 (2006.01); G02B 1/113 (2015.01); B32B 7/02 (2019.01); B32B 9/04 (2006.01); C03C 17/25 (2006.01); C04B 35/447 (2006.01); C04B 35/634 (2006.01); C23C 18/12 (2006.01); C04B 35/111 (2006.01); C04B 35/622 (2006.01); B32B 9/00 (2006.01); C04B 35/10 (2006.01);
U.S. Cl.
CPC ...
G02B 1/113 (2013.01); B32B 7/02 (2013.01); B32B 9/005 (2013.01); B32B 9/04 (2013.01); C03C 17/25 (2013.01); C04B 35/10 (2013.01); C04B 35/111 (2013.01); C04B 35/447 (2013.01); C04B 35/62218 (2013.01); C04B 35/63488 (2013.01); C23C 18/1216 (2013.01); C03C 2217/214 (2013.01); C03C 2217/23 (2013.01); C03C 2217/425 (2013.01); C03C 2217/732 (2013.01); C03C 2218/113 (2013.01); C04B 2235/3218 (2013.01); C04B 2235/75 (2013.01); C04B 2235/963 (2013.01);
Abstract

Disclosed herein are embodiments of a porous aluminum oxide thin film having a surface RMS roughness value of less than 1 nm. The thin film may also comprise phosphorus. The disclosed thin films may have a refractive index of from 1 to 2, such as from 1 to 1.5. Also disclosed are embodiments of as method for making the disclosed thin films, comprising forming an aqueous solution of the alumina precursor, a surfactant and optionally a phosphorus-containing precursor, and depositing the solution on a substrate.

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