The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2021
Filed:
Nov. 22, 2019
Interface Technology (Chengdu) Co., Ltd., Sichuan, CN;
Interface Optoelectronics (Shenzhen) Co., Ltd., Guangdong, CN;
General Interface Solution Limited, Miaoli County, TW;
Yu-Chieh Tu, Guangdong, CN;
Interface Technology (ChengDu) Co., Ltd., Sichuan, CN;
Interface Optoelectronics (ShenZhen) Co., Ltd., Guangdong, CN;
General Interface Solution Limited, Miaoli County, TW;
Abstract
The invention provides a humidity sensor and a manufacturing method thereof. The humidity sensor comprises a substrate, an electrode structure, and a humidity sensing structure. The electrode structure is disposed on the substrate. The humidity sensing structure is disposed on the electrode structure. The humidity sensing structure includes a first humidity sensing layer and a second humidity sensing layer. The first humidity sensing layer is in direct contact with the electrode structure and has a first oxygen vacancy number. The second humidity sensing layer is disposed on the first humidity sensing layer and has a second oxygen vacancy number. The second oxygen vacancy number is greater than the first oxygen vacancy number.