The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 08, 2021

Filed:

Jul. 12, 2017
Applicant:

Nanofocus Ag, Oberhausen, DE;

Inventor:

Johannes Frank, Cologne, DE;

Assignee:

Nanofocus AG, Oberhausen, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); G01B 11/026 (2013.01); G01B 2210/50 (2013.01);
Abstract

The invention relates to a method and a device for the optical measurement of technical surfaces by means of a chromatic confocal sensor, wherein light from a light source () is directed to the surface () of a sample to be measured via an optical system () with defined chromatic aberration. According to the invention, the light source () can be tuned in relation to the wavelength to be emitted. The light reflected back from the sample surface () is directed to at least one photosensor (), wherein the sensor signal is measured over time by means of a detection system () and the time of a signal maximum is determined. The detection system () derives the height Z of the surface () from the wavelength of the light source () at the time of the signal maximum.


Find Patent Forward Citations

Frank, Johannes. (2021). Method and device for optical surface measurement by means of a chromatic confocal sensor (U.S. Patent No. 11029143). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11029143

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…