The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2021
Filed:
Oct. 07, 2019
Applicants:
SK Innovation Co., Ltd., Seoul, KR;
Sk-materials Co., Ltd., Yeongju-si, KR;
Inventors:
Cheol Woo Kim, Daejeon, KR;
Yu Na Shim, Daejeon, KR;
Kwang Kuk Lee, Daejeon, KR;
Jae Hoon Kwak, Yeongju-si, KR;
Young Bom Kim, Yeongju-si, KR;
Jong Ho Lee, Yeongju-si, KR;
Jin Kyung Jo, Yeongju-si, KR;
Assignees:
SK Innovation Co., Ltd., Seoul, KR;
SK-Materials Co., Ltd., Yeongju-si, KR;
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/06 (2006.01); H01L 21/311 (2006.01); C23F 1/10 (2006.01);
U.S. Cl.
CPC ...
C09K 13/06 (2013.01); H01L 21/31111 (2013.01); C23F 1/10 (2013.01);
Abstract
An etching composition is provided. The etching composition includes phosphoric acid, phosphoric anhydride, a silane compound represented by Formula 1 below and water: