The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 01, 2021

Filed:

Mar. 21, 2019
Applicant:

Everspin Technologies, Inc., Chandler, AZ (US);

Inventors:

Renu Whig, Chandler, AZ (US);

Phillip Mather, Phoenix, AZ (US);

Kenneth Smith, Chandler, AZ (US);

Sanjeev Aggarwal, Scottsdale, AZ (US);

Jon Slaughter, Slingerlands, NY (US);

Nicholas Rizzo, Gilbert, AZ (US);

Assignee:

Everspin Technologies, Inc., Chandler, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); B82Y 25/00 (2011.01); G01R 33/00 (2006.01); G01R 33/09 (2006.01); H01L 27/22 (2006.01); H01L 43/08 (2006.01); H01L 43/02 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); B82Y 25/00 (2013.01); G01R 33/0052 (2013.01); G01R 33/09 (2013.01); G01R 33/093 (2013.01); G01R 33/098 (2013.01); H01L 27/22 (2013.01); H01L 43/02 (2013.01); H01L 43/08 (2013.01);
Abstract

A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a 'Z' axis magnetic field onto sensors orientated in the XY plane.


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