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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11024762 B1

PDFFull Text
Date of Patent:
Jun. 01, 2021

Filed:

Jan. 16, 2018

Substrate processing system, substrate conveying device and conveying method

Applicant:

Lawrence Chung-lai Lei, Milpitas, CA (US);

Inventor:

Lawrence Chung-Lai Lei, Milpitas, CA (US);

Assignee:

Other;

Attorney:

Vista IP Law Group, LLP

Primary Examiner:

Saul Rodriguez

Assistant Examiner:

Brendan P Tighe

Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 31/18 (2006.01); B65G 47/22 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1876 (2013.01); B65G 47/22 (2013.01); H01L 21/67161 (2013.01); H01L 21/67742 (2013.01); H01L 21/67745 (2013.01); H01L 21/67766 (2013.01); H01L 31/18 (2013.01); H01L 31/1804 (2013.01); Y02P 70/50 (2015.11);
Abstract

A conveying device for conveying at least a first row of substrates and a second row of substrates, includes: a conveying fork having a main body and a plurality of branches, a first end of each of the branches is connected to the main body, and a second end of each of the branches is a free end; wherein a first branch of the plurality branches has a first plurality of grooves, and a second branch of the plurality of branches has a second plurality of grooves; and wherein one of the first plurality of grooves and one of the second plurality of grooves are configured to support one of the substrates in the first row.

Find Patent Forward Citations

Lei, Lawrence Chung-Lai. (2021). Substrate processing system, substrate conveying device and conveying method (U.S. Patent No. 11024762). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11024762

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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