The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Jul. 23, 2019
Screen Holdings Co., Ltd., Kyoto, JP;
SCREEN HOLDINGS CO., LTD., Kyoto, JP;
Abstract
Dummy running is carried out which performs preheating treatment using halogen lamps and flash heating treatment using flash lamps on a dummy wafer to control the temperature of in-chamber structures including a susceptor and the like. In this process, a preheating counter or a flash heating counter is incremented each time the preheating treatment or the flash heating treatment is performed. An alarm is issued, if the preheating counter or the flash heating counter that is a wear-and-tear value of the dummy wafer is not less than a predetermined threshold value. This allows an operator of a heat treatment apparatus to recognize that the deterioration of the dummy wafer reaches a limit value, thereby preventing the erroneous treatment of a dummy wafer suffering advanced deterioration.