The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Sep. 11, 2018
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Theodorus Oosterlaken, Oudewater, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27D 5/00 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); F27D 3/00 (2006.01); F27B 17/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); F27D 3/0084 (2013.01); F27D 5/0037 (2013.01); F27D 5/0062 (2013.01); H01L 21/67303 (2013.01); F27B 17/0025 (2013.01);
Abstract
A substrate processing apparatus, comprising a substrate support () provided with a support surface () for supporting a substrate or a substrate carrier () thereon and a support heater () constructed and arranged to heat the support surface (). The apparatus comprises a heat shield constructed and arranged to cover and shield the substrate support () when no substrate or substrate carrier () is on the support surface.