The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Jun. 20, 2018
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
International Business Machines Corporation, Armonk, NY (US);
Seiichiro Tachibana, Joetsu, JP;
Takeru Watanabe, Joetsu, JP;
Keisuke Niida, Joetsu, JP;
Hiroko Nagai, Joetsu, JP;
Takashi Sawamura, Joetsu, JP;
Tsutomu Ogihara, Joetsu, JP;
Alexander Edward Hess, San Jose, CA (US);
Gregory Breyta, San Jose, CA (US);
Daniel Paul Sanders, San Jose, CA (US);
Rudy J. Wojtecki, San Jose, CA (US);
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
A compound shown by the following general formula (1-1), AR1 and AR2 each independently represent an aromatic ring or an aromatic ring containing at least one nitrogen and/or sulfur atom, two AR1s, AR1 and AR2, or two AR2s are optionally bonded; AR3 represents a benzene, naphthalene, thiophene, pyridine, or diazine ring; A represents an organic group; B represents an anionic leaving group; Y represents a divalent organic group; 'p' is 1 or 2; 'q' is 1 or 2; “r” is 0 or 1; “s” is 2 to 4; when s=2, Z represents a single bond, divalent atom, or divalent organic group; and when s=3 or 4, Z represents a trivalent or quadrivalent atom or organic group. This compound cures to form an organic film, and also forms an organic under layer film.