The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Sep. 19, 2016
Applicant:
Sciosense B.v., AE Eindhoven, NL;
Inventors:
Assignee:
Sciosense B.V., AE Eindhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); G01N 27/414 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/128 (2013.01); G01N 27/22 (2013.01); G01N 27/414 (2013.01); B81B 2201/02 (2013.01); G01N 27/4148 (2013.01);
Abstract
A gas sensor with a gas permeable region is disclosed. In an embodiment a gas sensor includes a dielectric membrane formed on a semiconductor substrate having a cavity portion, a heater located within or over the dielectric membrane, a material for sensing a gas, wherein the material is located on one side of the dielectric membrane, a support structure located near the material, a gas permeable membrane coupled to the support structure so as to protect the material, wherein the semiconductor substrate forms the support structure.