The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 01, 2021

Filed:

Jul. 29, 2019
Applicant:

Hitachi High-tech Science Corporation, Tokyo, JP;

Inventor:

Yoshiki Matoba, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2018.01); G01N 23/044 (2018.01); G01N 23/046 (2018.01); G01N 23/06 (2018.01); G01N 23/083 (2018.01); G01N 23/087 (2018.01); G01N 23/18 (2018.01);
U.S. Cl.
CPC ...
G01N 23/18 (2013.01); G01N 23/04 (2013.01); G01N 23/044 (2018.02); G01N 23/046 (2013.01); G01N 23/06 (2013.01); G01N 23/083 (2013.01); G01N 23/087 (2013.01); G01N 2223/3306 (2013.01);
Abstract

An X-ray transmission inspection apparatus includes an X-ray source for irradiating a sample with X-rays, a two-dimensional sensor for detecting transmission X-rays passing through the sample, a sample moving mechanism for moving the sample, a calculation unit for processing an image of the transmission X-rays detected by the two-dimensional sensor, and a display unit for displaying a cross-sectional image. When Vis a speed at which the sample moves, F is a frame rate of the two-dimensional sensor, A is a sample pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor, the calculation unit creates a cross-sectional image taken at a distance L from the X-ray source by adding the images of the pixels positioned at an interval of [(LS×V)/(L×F×A)] in a direction in which the sample moves.


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