The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Jul. 12, 2019
Applicant:
Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;
Inventor:
Carsten Deus, Dresden, DE;
Assignee:
VON ARDENNE ASSET GMBH & CO. KG, Dresden, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/30 (2006.01); H01J 37/305 (2006.01); H01J 37/20 (2006.01); C23C 14/50 (2006.01); H01J 37/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/30 (2013.01); C23C 14/50 (2013.01); H01J 37/06 (2013.01); H01J 37/20 (2013.01); H01J 37/305 (2013.01); H01J 2237/204 (2013.01); H01J 2237/3132 (2013.01); H01J 2237/31732 (2013.01);
Abstract
In accordance with various embodiments, a coating arrangement may comprise: an electron beam gun for providing an electron beam; a beam trap for trapping the electron beam; a control device for driving the electron beam gun and/or the beam trap, wherein the control device is configured to switch over the driving between a plurality of configurations, of which: in a first configuration, the electron beam is directed onto the beam trap; and in a second configuration, the electron beam is directed past the beam trap.