Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and manufacturing method of piezoelectric device

Abstract

Provided is a piezoelectric device including: a substrate () on which a plurality of recesses () are provided; a vibrating plate () which is provided on one surface side of the substrate; and a piezoelectric element () which is provided over the vibrating plate () and on which a first electrode (), a piezoelectric layer (), and a second electrode () are laminated from the substrate () side, in which the first electrode () is formed to have a first width which is smaller than a dimension of the recess in a parallel arrangement direction in the parallel arrangement direction of at least one recess (), and the piezoelectric layer () is extended to the outer side of the first electrode () in the parallel arrangement direction and has a second width which is greater than the first width and smaller than a width of the recess () in the parallel arrangement direction, the vibrating plate () contains a zirconium oxide layer (), and when an area of the zirconium oxide layer () corresponding to the first electrode having the first width is set as a first area (p), areas of the zirconium oxide layer () corresponding to areas where the piezoelectric layer () is provided on the outer side of the first area (p) in the parallel arrangement direction are set as second areas (q), and areas of the zirconium oxide layer () corresponding to the recess () on the outer side of the second areas (q) in the parallel arrangement direction are set as third areas (r), the zirconium oxide layer () contains particulate crystal in the first area (p) at least on the first electrode () side in the thickness direction and contains columnar crystal in the third areas (r).