The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 01, 2021

Filed:

Oct. 04, 2018
Applicant:

Brooks Automation, Inc., Chelmsford, MA (US);

Inventors:

Sean E Plaisted, Newburyport, MA (US);

Leigh F Sharrock, Londonderry, NH (US);

Chris Aitken, Berkshire, GB;

Assignee:

BROOKS AUTOMATION, INC., Chelmsford, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/04 (2006.01); B25J 9/06 (2006.01); B25J 9/10 (2006.01); H01L 21/683 (2006.01); B25J 17/02 (2006.01); B25J 15/00 (2006.01); H01L 21/687 (2006.01); B25J 9/16 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B25J 9/042 (2013.01); B25J 9/06 (2013.01); B25J 9/106 (2013.01); B25J 9/107 (2013.01); B25J 9/1615 (2013.01); B25J 15/0052 (2013.01); B25J 17/0283 (2013.01); H01L 21/67265 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); H01L 21/6838 (2013.01); H01L 21/68707 (2013.01);
Abstract

A substrate transport apparatus including; a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.


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