The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2021

Filed:

Oct. 18, 2019
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventor:

Yoichiro Kurita, Minato Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 24/97 (2013.01); H01L 21/67132 (2013.01); H01L 24/75 (2013.01); H01L 24/83 (2013.01); H01L 21/02076 (2013.01); H01L 2224/753 (2013.01); H01L 2224/756 (2013.01); H01L 2224/759 (2013.01); H01L 2224/7525 (2013.01); H01L 2224/7555 (2013.01); H01L 2224/75743 (2013.01); H01L 2224/832 (2013.01); H01L 2224/838 (2013.01); H01L 2224/83104 (2013.01); H01L 2224/97 (2013.01); H01L 2924/05442 (2013.01); H01L 2924/1032 (2013.01); H01L 2924/10253 (2013.01);
Abstract

A bonding method of a first member includes arranging an activated front surface of a first member and an activated front surface of a second member so as to face each other with a back surface of the first member attached to a sheet, pushing a back surface of the first member through the sheet to closely attach the activated front surface of the first member and the activated front surface of the second member, and stripping the sheet from the back surface of the first member while maintaining a state in which the activated front surface of the first member is closely attached to the activated front surface of the second member.


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