The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Nov. 20, 2018
Applicant:
Watlow Electric Manufacturing Company, St. Louis, MO (US);
Inventor:
Mohammad Nosrati, Redwood City, CA (US);
Assignee:
Watlow Electric Manufacturing Company, St. Louis, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16M 13/00 (2006.01); H01L 21/687 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68757 (2013.01); C23C 16/4586 (2013.01); C23C 16/45536 (2013.01); C23C 16/45544 (2013.01); C23C 16/45553 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/68792 (2013.01);
Abstract
A method of manufacturing a pedestal includes having a support plate including a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, preparing a tubular shaft that defines a chamber, securing the tubular shaft to the support plate, the conductive member being exposed in the chamber of the tubular shaft, and applying a protective layer on the conductive member by an atomic layer deposition (ALD) process. A system for manufacturing the pedestal and a pedestal are also provided in the present disclosure.