The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Dec. 05, 2018
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Ozkan Ozturk, Round Rock, TX (US);
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3105 (2006.01); G03F 7/00 (2006.01); B29C 43/02 (2006.01); B29C 43/00 (2006.01); B81C 1/00 (2006.01); B29C 35/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31051 (2013.01); B29C 35/02 (2013.01); B29C 43/003 (2013.01); B29C 43/021 (2013.01); B81C 1/00611 (2013.01); G03F 7/0002 (2013.01); B29C 2043/025 (2013.01); B81C 2201/0119 (2013.01);
Abstract
An apparatus may include a superstrate. The superstrate can include a body having a diameter. The body may fit within a projected square. The projected square may have a length equal to the diameter of the body. The body within the projected square may produce an open area between an exterior edge of the body and the projected square. The superstrate may further include a first projection extending from the exterior edge of the body within the open area.