The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Sep. 17, 2019
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Assignee:
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/20 (2013.01); H01J 2237/202 (2013.01); H01J 2237/24495 (2013.01);
Abstract
A charged particle beam system includes a charged particle beam deviceand the detection circuit. The charged particle beam deviceincludes a first antennahaving a first resonant frequency and a second antennahaving a second resonant frequency. The detection circuitincludes a first amplitude detection unitwhich detects a first amplitude of a signal after passing a first filter, a second amplitude detection unitwhich detects a second amplitude of a signal after passing a second filter, and an amplitude comparison unitwhich compares the first amplitude with the second amplitude.