The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Aug. 22, 2018
Rosemount Aerospace Inc., Burnsville, MN (US);
Christopher Sanden, Bloomington, MN (US);
James Joseph Mctighe, Burnsville, MN (US);
Cuong Tho Huynh, Eagan, MN (US);
Rosemount Aerospace Inc., Burnsville, MN (US);
Abstract
A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.