The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2021

Filed:

Feb. 21, 2019
Applicant:

Anyon Systems Inc., Dorval, CA;

Inventors:

Alireza Najafi-Yazdi, Vaudreuil-Dorion, CA;

William Georges, La Prairie, CA;

Assignee:

ANYON SYSTEMS INC., Dorval, CA;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 23/02 (2006.01); C23C 14/28 (2006.01); C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
C30B 23/02 (2013.01); C23C 14/28 (2013.01); C23C 14/505 (2013.01);
Abstract

An apparatus and method for molecular beam epitaxy are described herein. The apparatus comprises an enclosure defining a vacuum chamber. A substrate holder is mounted within the vacuum chamber. At least one molecular beam source is in fluid communication with the vacuum chamber. A cooling shroud having at least one surface is mounted within the vacuum chamber spaced from the substrate holder. A cryocooler having at least a portion extending into the vacuum chamber is operatively coupled to the cooling shroud for extracting heat therefrom, and cooling the at least one surface of the cooling shroud to cryogenic temperatures.


Find Patent Forward Citations

Najafi-Yazdi, Alireza. (2021). Apparatus and method for molecular beam epitaxy (U.S. Patent No. 11015262). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11015262

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…