The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Apr. 24, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Tatsuya E. Sato, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/24 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/04 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45544 (2013.01); C23C 16/045 (2013.01); C23C 16/458 (2013.01); C23C 16/45551 (2013.01);
Abstract
Gas injector units for processing chambers having one or more of scavenging ports, differential pressure ports and variable surfaces for variable injector to substrate gap distances are described. Gas distribution assemblies and processing chambers incorporating the gas injector units are also described.