The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2021

Filed:

May. 12, 2020
Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventor:

Toshiyuki Sasaki, Yokkaichi Mie, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B26B 29/02 (2006.01); H01L 27/11582 (2017.01); H01L 27/11578 (2017.01); H01L 29/792 (2006.01); G11C 16/10 (2006.01); H01L 23/528 (2006.01); H01L 23/532 (2006.01); H01L 27/1157 (2017.01); H01L 21/311 (2006.01); A45F 5/02 (2006.01); B24B 3/54 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
B26B 29/025 (2013.01); A45F 5/021 (2013.01); B24B 3/54 (2013.01); G11C 16/10 (2013.01); H01L 21/31116 (2013.01); H01L 23/528 (2013.01); H01L 23/53257 (2013.01); H01L 23/53261 (2013.01); H01L 27/1157 (2013.01); H01L 27/11578 (2013.01); H01L 27/11582 (2013.01); H01L 29/7926 (2013.01); H01L 29/1037 (2013.01); H01L 2924/0002 (2013.01);
Abstract

According to one embodiment, the stacked body includes a plurality of stacked units and a first intermediate layer. Each of the stacked units includes a plurality of electrode layers and a plurality of insulating layers. Each of the insulating layers is provided between the electrode layers. The first intermediate layer is provided between the stacked units. The first intermediate layer is made of a material different from the electrode layers and the insulating layers. The plurality of columnar portions includes a channel body extending in a stacking direction of the stacked body to pierce the stacked body, and a charge storage film provided between the channel body and the electrode layers.


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