The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2021

Filed:

Apr. 05, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Keith E. Fogel, Hopewell Junction, NY (US);

Augustin J. Hong, Culver City, CA (US);

Jeehwan Kim, Cambridge, MA (US);

Devendra K. Sadana, Pleasantville, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0236 (2006.01); H01L 31/18 (2006.01); H01L 31/077 (2012.01); H01L 31/0376 (2006.01); H01L 31/0352 (2006.01); H01L 31/0224 (2006.01); H01L 31/075 (2012.01);
U.S. Cl.
CPC ...
H01L 31/02366 (2013.01); H01L 31/02363 (2013.01); H01L 31/022483 (2013.01); H01L 31/03529 (2013.01); H01L 31/03762 (2013.01); H01L 31/035281 (2013.01); H01L 31/075 (2013.01); H01L 31/077 (2013.01); H01L 31/1804 (2013.01); H01L 31/1888 (2013.01); Y02E 10/50 (2013.01);
Abstract

A photovoltaic device and method include forming a plurality of pillar structures in a substrate, forming a first electrode layer on the pillar structures and forming a continuous photovoltaic stack including an N-type layer, a P-type layer and an intrinsic layer on the first electrode. A second electrode layer is deposited over the photovoltaic stack such that gaps or fissures occur in the second electrode layer between the pillar structures. The second electrode layer is wet etched to open up the gaps or fissures and reduce the second electrode layer to form a three-dimensional electrode of substantially uniform thickness over the photovoltaic stack.


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