The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2021

Filed:

Nov. 01, 2018
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Kiyofumi Sakaguchi, Miura-gun, JP;

Masahiro Kobayashi, Tokyo, JP;

Eiichi Takami, Chigasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01J 37/244 (2006.01); G01T 1/24 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14605 (2013.01); G01T 1/24 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01L 27/1463 (2013.01); H01L 27/14607 (2013.01); H01L 27/14636 (2013.01); H01L 27/14659 (2013.01); H01L 27/14661 (2013.01);
Abstract

A detector includes a semiconductor layer included in a detection region and a peripheral region, and having a first surface and a second surface opposite to the first surface, and a wiring structure included in at least the detection region, and disposed between a space on the first surface side with respect to the semiconductor layer and a space on the second surface side with respect to the semiconductor layer, wherein a thickness of the semiconductor layer in at least a part of the detection region is smaller than a thickness of the peripheral region including the semiconductor layer, and the thickness of the semiconductor layer is larger than a distance between the first surface in the detection region and the space on the first surface side, and a distance between the second surface in the detection region and the space on the second surface side.


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