The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Feb. 06, 2020
Applicant:
Qualcomm Incorporated, San Diego, CA (US);
Inventors:
Samy Shafik Tawfik Zaynoun, San Diego, CA (US);
David Kidd, San Diego, CA (US);
Assignee:
QUALCOMM INCORPORATED, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49838 (2013.01); H01L 24/05 (2013.01);
Abstract
An integrated circuit (IC), including a substrate and back-end-of-line (BEOL) layers on the substrate is described. The IC includes a sensor in a BEOL layer (Mx) of the BEOL layers. The BEOL sensor includes conductive traces and shield traces interdigitated with the conductive traces in the BEOL layer Mx. The BEOL sensor also includes a first ground shield in a BEOL layer Mx−1, and a second ground shield in a BEOL layer Mx+1. The BEOL sensor further includes logic configured to ground/float the shield traces.