The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Oct. 24, 2019
Nikon Corporation, Tokyo, JP;
Atsushi Hara, Yokohama, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A liquid crystal exposure apparatus is equipped with: a substrate holder that is disposed below a projection optical system and holds a substrate; a first drive section that moves the substrate holder along an XY plane; heads that measures the position information of the substrate holder; head stages that support the heads and are movable within the XY plane; and a second drive section that moves the head stages in the X-axis direction and the Y-axis direction, and the second drive section moves the head stages in the X-axis direction or the Y-axis direction when the substrate holder is moved in the X-axis direction or the Y-axis direction by the first drive section.