The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2021

Filed:

Jan. 08, 2015
Applicant:

Edwards Japan Limited, Yachiyo, JP;

Inventors:

Manabu Nonaka, Yachiyo, JP;

Takashi Kabasawa, Yachiyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04D 29/54 (2006.01); F04D 19/04 (2006.01); F04D 29/52 (2006.01); F04D 29/58 (2006.01);
U.S. Cl.
CPC ...
F04D 29/545 (2013.01); F04D 19/044 (2013.01); F04D 19/046 (2013.01); F04D 29/522 (2013.01); F04D 29/584 (2013.01); F04D 29/5853 (2013.01); F05B 2240/12 (2013.01); F05B 2240/14 (2013.01); F05B 2240/51 (2013.01); F05B 2260/231 (2013.01); F05B 2280/1021 (2013.01); F05B 2280/6015 (2013.01); F05D 2260/607 (2013.01);
Abstract

To provide a vacuum pump capable of heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and prevents the accumulation of a product that is caused by a decrease in the temperature of process gas near the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port.


Find Patent Forward Citations

Loading…