The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Apr. 21, 2020
Sakai Display Products Corporation, Osaka, JP;
Susumu Sakio, Osaka, JP;
Katsuhiko Kishimoto, Osaka, JP;
Sakai Display Products Corporation, Osaka, JP;
Abstract
A vapor deposition apparatus disclosed by an embodiment comprises: a vacuum chamber (); a mask holder () for holding a deposition mask; a substrate holder () for holding a substrate for vapor deposition (); an electromagnet () disposed above a surface; a vapor deposition sourcefor vaporizing or sublimating a vapor deposition material; and a heat pipe () including at least a heat absorption part () and a heat dissipation part (), the heat absorption part being in contact with the electromagnet (), and the heat dissipation part being derived to an outside of the vacuum chamber (). The heat pipe () and the electromagnet () are in intimate contact with each other at an area of a contact part between the heat pipe () and the electromagnet (), the area being equal to or more than a cross-sectional area within an inner perimeter of a coil ().