The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2021

Filed:

Dec. 11, 2018
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventor:

Helene Lhermet, Meylan, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/18 (2006.01); B81B 3/00 (2006.01); G01P 15/12 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0018 (2013.01); B81B 3/0051 (2013.01); B81B 3/0078 (2013.01); G01L 1/18 (2013.01); G01P 15/123 (2013.01); B81B 2201/0228 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/0172 (2013.01); B81B 2203/051 (2013.01); B81B 2207/053 (2013.01);
Abstract

A microelectromechanical and/or nanoelectromechanical device having a fixed part, at least one suspended part configured to be moveable in the plane of the device with respect to the fixed part along at least one first direction and a first suspension means for suspending the suspended part. The first suspension means includes two suspension elements each having a first end fixed directly to the suspended part and a second end connected to the fixed part, each suspension element having a half-ellipse shape in the plane and extending between the first end and the second end, and the two suspension elements being arranged with respect to each other so as to form an ellipse.


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