The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Feb. 14, 2018
Applicant:
Rohm Co., Ltd., Kyoto, JP;
Inventor:
Takaya Nagahata, Kyoto, JP;
Assignee:
ROHM CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); B41J 2/14 (2006.01); H01L 41/09 (2006.01); B41J 2/16 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1632 (2013.01); B41J 2/1645 (2013.01); B41J 2/1646 (2013.01); H01L 41/047 (2013.01); H01L 41/0973 (2013.01); B41J 2002/14258 (2013.01); H01L 41/0815 (2013.01); H01L 41/1876 (2013.01); H01L 41/318 (2013.01);
Abstract
A piezoelectric film includes a plurality of laminated main baking unit PZT layers. A first seed layer is present at a lower surface side of a lowermost main baking unit PZT layer. A second seed layer is interposed between two adjacent main baking unit PZT layers at an intermediate position between the lowermost main baking unit PZT layer and an uppermost main baking unit PZT layer.