The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2021

Filed:

Mar. 30, 2015
Applicant:

Hamamatsu Photonics K.k., Hamamatsu, JP;

Inventors:

Takeshi Sakamoto, Hamamatsu, JP;

Takafumi Ogiwara, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/53 (2014.01); B23K 26/064 (2014.01); B23K 26/03 (2006.01); B23K 26/082 (2014.01); C03B 33/02 (2006.01); B23K 26/0622 (2014.01); B23K 26/073 (2006.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01); C03B 33/07 (2006.01);
U.S. Cl.
CPC ...
B23K 26/53 (2015.10); B23K 26/03 (2013.01); B23K 26/064 (2015.10); B23K 26/0622 (2015.10); B23K 26/0738 (2013.01); B23K 26/082 (2015.10); C03B 33/0222 (2013.01); B23K 2101/40 (2018.08); B23K 2103/52 (2018.08); B23K 2103/54 (2018.08); B23K 2103/56 (2018.08); C03B 33/07 (2013.01);
Abstract

A laser processing device includes a laser light source, a converging optical system, a controller, and a reflective spatial light modulator. The controller and the reflective spatial light modulator, while using an aberration as a reference aberration, the aberration occurring when laser light is converged at a converging position with an amount of aberration correction in a state in which an ideal converging position is shifted by a predetermined distance to a laser light entrance side from the converging position, adjusts the aberration such that a first converging length longer than a reference converging length of the reference aberration is obtained and a first converging intensity less than a reference converging intensity of the reference aberration is obtained, when a modified region is formed within a first region closest to a front face of an object to be processed.


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