The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Oct. 29, 2014
Applicant:
Toshiba Mitsubishi-electric Industrial Systems Corporation, Chuo-ku, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/54 (2006.01); C23C 16/455 (2006.01); B01J 4/00 (2006.01); H05H 1/24 (2006.01); H01L 21/31 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
B01J 4/002 (2013.01); B01J 4/00 (2013.01); B01J 4/008 (2013.01); C23C 14/228 (2013.01); C23C 16/455 (2013.01); C23C 16/45565 (2013.01); H01L 21/31 (2013.01); H05H 1/24 (2013.01); H05H 1/2406 (2013.01); H05H 2001/2462 (2013.01);
Abstract
A gas jetting apparatus capable of uniformly jetting, even onto a treatment-target object having a high-aspect-ratio groove, a gas into the groove. The gas jetting apparatus includes a gas jetting cell unit for jetting a gas toward a treatment-target object. The gas jetting cell unit includes a first cone-shaped member and a second cone-shaped member. A gap is formed between a side surface of a first cone shape and a side surface of the second cone-shaped member. Apex sides of the cone-shaped members face the treatment-target object.