The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 11, 2021

Filed:

Jun. 06, 2019
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventor:

Ippei Hatsuda, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/10 (2006.01); H03F 3/20 (2006.01); H03H 3/10 (2006.01); H03H 9/05 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H01L 23/10 (2006.01); H01L 23/02 (2006.01); H04B 1/40 (2015.01);
U.S. Cl.
CPC ...
H03H 9/02897 (2013.01); H01L 23/02 (2013.01); H01L 23/10 (2013.01); H03F 3/20 (2013.01); H03H 3/10 (2013.01); H03H 9/02559 (2013.01); H03H 9/02834 (2013.01); H03H 9/059 (2013.01); H03H 9/1092 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01); H01L 2924/16235 (2013.01); H03F 2200/165 (2013.01); H03F 2200/171 (2013.01); H03F 2200/294 (2013.01); H03F 2200/451 (2013.01); H04B 1/40 (2013.01);
Abstract

An acoustic wave device includes a piezoelectric substrate, an IDT electrode provided on the piezoelectric substrate, a support provided on the piezoelectric substrate so as to surround the IDT electrode, and a cover provided on the support. The support has a larger thermal expansion coefficient than the piezoelectric substrate. The IDT electrode is provided in a hollow space that is surrounded by the piezoelectric substrate, the support, and the cover. The support includes an inner surface on a side of the hollow space, and an outer surface on a side opposite to the inner surface, and the support includes a recess provided in at least one of the inner and outer surfaces.


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