The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
May. 31, 2019
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Tadamasa Iwamoto, Tokyo, JP;
Takuya Kudo, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); H01L 21/68 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); H01L 21/6773 (2013.01); H01L 21/67772 (2013.01); H01L 21/67775 (2013.01);
Abstract
A load port includes a door and a mapping sensor. The door moves upward and downward between a closing position for closing an opening connected into a container with multiple stages for placing a plurality of substrates and an opening position for opening the opening. The mapping sensor is disposed integrally with the door and detects a state of the substrates. The mapping sensor includes a light emitting portion and an imaging portion. The light emitting portion emits an imaging light toward the substrates. The imaging portion captures an image of a reflected light of the imaging light.