logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11004702 B1

PDFFull Text
Date of Patent:
May. 11, 2021

Filed:

Oct. 27, 2016

Film processing unit and substrate processing apparatus

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Yuji Tanaka, Kyoto, JP;

Masaya Asai, Kyoto, JP;

Masahiko Harumoto, Kyoto, JP;

Koji Kaneyama, Kyoto, JP;

Assignee:

SCREEN Holdings Co., Ltd.;

Attorney:

Ostrolenk Faber LLP

Primary Examiner:

Joseph L Perrin

Assistant Examiner:

Irina Graf

Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/26 (2006.01); H01L 21/67 (2006.01); G03F 7/004 (2006.01); G03F 7/30 (2006.01); G03F 7/16 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67057 (2013.01); G03F 7/0002 (2013.01); G03F 7/0043 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/11 (2013.01); G03F 7/162 (2013.01); G03F 7/26 (2013.01); G03F 7/3021 (2013.01); G03F 7/3092 (2013.01); H01L 21/6708 (2013.01); H01L 21/6715 (2013.01); H01L 21/67051 (2013.01); H01L 21/67178 (2013.01);
Abstract

A nozzle is stored in a nozzle storage hole of a waiting pod. In this state, a cleaning liquid is discharged to an outer peripheral surface of the nozzle from a plurality of discharge ports. Thus, a coating liquid and its solidified matter adhering to the nozzle are dissolved and removed from the nozzle. Subsequently, a metal removal liquid is discharged from a plurality of discharge ports to the outer peripheral surface of the nozzle. Thus, a metallic component remaining on the nozzle is dissolved and removed from the nozzle. Further, pure water is discharged to the outer peripheral surface of the nozzle from the plurality of discharge ports, and the metal removal liquid adhering to the nozzle is cleaned away.

Find Patent Forward Citations

Loading…