The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 11, 2021

Filed:

Apr. 21, 2017
Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Tomoya Ohashi, Toyama, JP;

Hiroto Ogata, Toyama, JP;

Yuto Hashimoto, Toyama, JP;

Yuki Usui, Toyama, JP;

Yasushi Sakaida, Toyama, JP;

Takahiro Kishioka, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); G03F 7/11 (2006.01); H01L 21/308 (2006.01); G03F 7/09 (2006.01); C08G 18/40 (2006.01); C08G 18/48 (2006.01); C08G 18/62 (2006.01); C09D 175/04 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); H01L 21/027 (2006.01); H01L 21/306 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08G 18/4063 (2013.01); C08G 18/48 (2013.01); C08G 18/62 (2013.01); C09D 175/04 (2013.01); G03F 7/094 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/20 (2013.01); G03F 7/322 (2013.01); H01L 21/0274 (2013.01); H01L 21/308 (2013.01); H01L 21/3081 (2013.01); H01L 21/30604 (2013.01); H01L 21/32134 (2013.01); H01L 21/32139 (2013.01);
Abstract

A composition for forming a protective film against basic aqueous hydrogen peroxide solution, including a crosslinker having, in one molecule, two or more groups at least one selected from the group consisting of a glycidyl group, a terminal epoxy group, an epoxycyclopentyl group, an epoxycyclohexyl group, an oxetanyl group, a vinyl ether group, an isocyanate group, and a blocked isocyanate, a compound having a group of Formula (1): (wherein Xis a substituent reacting with the crosslinker, Ris a direct bond or a Calkylene group, Xis a Calkyl group, Calkoxy group, or fluoro group, a is an integer of 0-2, b is an integer of 1-3, c is an integer of 0-4, and b and c satisfy a relational expression of 1≤(b+c)≤5) on a side chain or a terminal and having a weight average molecular weight of 800 or more, and an organic solvent.


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