The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Aug. 05, 2019
Applicant:
Samsung Display Co., Ltd., Yongin-Si, KR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/84 (2012.01); G01N 21/956 (2006.01); G06T 7/00 (2017.01); G06T 7/12 (2017.01); G06T 7/13 (2017.01); G06T 7/11 (2017.01); G06T 7/162 (2017.01); G06T 5/00 (2006.01);
U.S. Cl.
CPC ...
G03F 1/84 (2013.01); G01N 21/95607 (2013.01); G06T 5/009 (2013.01); G06T 7/0006 (2013.01); G06T 7/11 (2017.01); G06T 7/12 (2017.01); G06T 7/13 (2017.01); G06T 7/162 (2017.01); G01N 2021/95676 (2013.01);
Abstract
A mask substrate inspection system includes a measurement target module, a camera module, and a control module. The measurement target module includes a mask substrate and a surface light source supplying a light to the mask substrate. The camera module generates image information of the mask substrate using the light from the surface light source. The control module determines whether defects are present in the mask substrate using the image information, without damaging the mask substrate.