The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Jun. 20, 2017
The Regents of the University of California, Oakland, CA (US);
Youmin Wang, Berkeley, CA (US);
Ming Chiang A Wu, Moraga, CA (US);
The Regents of the University of California, Oakland, CA (US);
Abstract
A spatial light modulator (SLM) is disclosed, wherein the SLM has a substrate comprising an array of MEMS-based mirror elements that is periodic with small pitch (<3 microns) and high fill factor (>80%) in a first dimension. Each mirror element includes a micromirror whose height above the substrate is controlled via a vertical comb-drive actuator, which is located completely beneath the micromirror in the first dimension. As a result, mirror element can control the phase of light reflected from its micromirror. In some embodiments, the SLM includes an array of mirror elements that is periodic with small pitch and high fill factor in two dimensions. In such embodiments, the actuator, as well as tethers for supporting the micromirror above the substrate, are located completely beneath the micromirror, thereby enabling high fill factor in both dimensions.