The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Jul. 23, 2018
Microjet Technology Co., Ltd., Hsinchu, TW;
Hao-Jan Mou, Hsinchu, TW;
Shih-Chang Chen, Hsinchu, TW;
Li-Pang Mo, Hsinchu, TW;
Jia-Yu Liao, Hsinchu, TW;
Hung-Hsin Liao, Hsinchu, TW;
Chih-Feng Lin, Hsinchu, TW;
Jheng-Wei Chen, Hsinchu, TW;
Chi-Feng Huang, Hsinchu, TW;
Yung-Lung Han, Hsinchu, TW;
MICROJET TECHNOLOGY CO., LTD., Hsinchu, TW;
Abstract
An actuating and sensing module includes a first substrate, a second substrate, an actuating device and a sensor. A gas flow channel is formed by stacking the first substrate and the second substrate. The gas inlet, the gas flow channel and the gas outlet are in communication with each other to define a gas flow loop. The actuating device is disposed in the gas inlet of the second substrate and electrically connected to a control circuit to obtain a driving power. The sensor is disposed in the gas flow loop and electrically connected to a control circuit of the first substrate to transmit sensed data. While the actuating device drives outside gas from the outside, the gas is transported into the gas flow loop and sensed by the sensor.